An edition of Semiconductor Lithography (1988)

Semiconductor Lithography

Principles, Practices, and Materials

by

Cover of: Semiconductor Lithography by Wayne M. Moreau, Wayne M. Moreau
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Last edited by MARC Bot
September 27, 2024 | History
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An edition of Semiconductor Lithography (1988)

Semiconductor Lithography

Principles, Practices, and Materials

by

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
Springer US
Language
English
Pages
952

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Buy this book

Previews available in: English

Subjects

Electrical engineering, Engineering, Computer engineering, Optical materials, Optical and Electronic Materials
Edition Availability
Cover of: Semiconductor Lithography
Semiconductor Lithography: Principles, Practices, and Materials
2012, Springer
in English
Cover of: Semiconductor Lithography
Semiconductor Lithography: Principles, Practices, and Materials
Dec 06, 2011, Springer
paperback
Cover of: Semiconductor Lithography
Semiconductor Lithography: Principles, Practices, and Materials
1988, Springer US
electronic resource : in English

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Book Details

Edition Notes

Published in
Boston, MA
Series
Microdevices, Physics and Fabrication Technologies, Microdevices, Physics and Fabrication Technologies

Classifications

Library of Congress
TK1-9971

The Physical Object

Format
[electronic resource] :
Pagination
1 online resource (952 pages).
Number of pages
952

ID Numbers

Open Library
OL27087072M
Internet Archive
semiconductorlit00more
ISBN 10
1461308852
ISBN 13
9781461308850
OCLC/WorldCat
840281175

Source records

Internet Archive item record
Better World Books record
harvard_bibliographic_metadata record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
September 27, 2024 Edited by MARC Bot import existing book
February 27, 2022 Edited by ImportBot import existing book
July 7, 2019 Created by MARC Bot Imported from Internet Archive item record