An edition of Semiconductor Lithography (1988)

Semiconductor Lithography

Principles, Practices, and Materials

by

Cover of: Semiconductor Lithography by Wayne M. Moreau, Wayne M. Moreau
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Last edited by MARC Bot
September 27, 2024 | History
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An edition of Semiconductor Lithography (1988)

Semiconductor Lithography

Principles, Practices, and Materials

by

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Publish Date
Publisher
Springer US
Language
English
Pages
952

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Previews available in: English

Subjects

Electrical engineering, Engineering, Computer engineering, Optical materials, Optical and Electronic Materials
Edition Availability
Cover of: Semiconductor Lithography
Semiconductor Lithography: Principles, Practices, and Materials
2012, Springer
in English
Cover of: Semiconductor Lithography
Semiconductor Lithography: Principles, Practices, and Materials
Dec 06, 2011, Springer
paperback
Cover of: Semiconductor Lithography
Semiconductor Lithography: Principles, Practices, and Materials
1988, Springer US
electronic resource : in English

Add another edition?

Book Details

Edition Notes

Published in
Boston, MA
Series
Microdevices, Physics and Fabrication Technologies, Microdevices, Physics and Fabrication Technologies

Classifications

Library of Congress
TK1-9971

The Physical Object

Format
[electronic resource] :
Pagination
1 online resource (952 pages).
Number of pages
952

Edition Identifiers

Open Library
OL27087072M
Internet Archive
semiconductorlit00more
ISBN 10
1461308852
ISBN 13
9781461308850
OCLC/WorldCat
840281175

Work Identifiers

Work ID
OL19901530W

Source records

Internet Archive item record
Better World Books record
harvard_bibliographic_metadata record

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History

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September 27, 2024 Edited by MARC Bot import existing book
July 7, 2019 Created by MARC Bot import new book