An edition of Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V (1986)

Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V

11-12 March 1986, Santa Clara, California

Cover of: Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V by Phillip D. Blais, chairman/editor.
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Last edited by ImportBot
July 31, 2023 | History
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An edition of Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V (1986)

Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V

11-12 March 1986, Santa Clara, California

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Publish Date
Publisher
SPIE--the International Society for Optical Engineering
Language
English
Pages
272

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Previews available in: English

Subjects

Electron beam Lithography, Congresses, Ion beam lithography, X-ray lithography, Microlithography

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Edition Availability
Cover of: Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V
Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V: 11-12 March 1986, Santa Clara, California
1986, SPIE--the International Society for Optical Engineering
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering ;, v. 632
Other Titles
Electron-beam, x-ray, and ion-beam techniques for submicrometer lithographies V.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7874 .E484 1986

The Physical Object

Pagination
vi, 272 p. :
Number of pages
272

ID Numbers

Open Library
OL2743457M
Internet Archive
electronbeamxray0632unse
ISBN 10
089252667X
LCCN
86061034
OCLC/WorldCat
13981354
Goodreads
3710399

Source records

Scriblio MARC record
Library of Congress MARC record
marc_columbia MARC record
Internet Archive item record

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July 31, 2023 Edited by ImportBot import existing book
December 11, 2022 Edited by MARC Bot import existing book
November 4, 2020 Edited by MARC Bot import existing book
April 3, 2019 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record