An edition of Abformung von Mikrostrukturen auf prozessierten Wafern (1993)

Abformung von Mikrostrukturen auf prozessierten Wafern

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Abformung von Mikrostrukturen auf prozessiert ...
Andreas Michel, Andreas Michel
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Last edited by MARC Bot
December 14, 2024 | History
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An edition of Abformung von Mikrostrukturen auf prozessierten Wafern (1993)

Abformung von Mikrostrukturen auf prozessierten Wafern

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Publish Date
Publisher
Kernforschungszentrum Karlsruhe
Language
German
Pages
84

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Edition Availability
Cover of: Abformung von Mikrostrukturen auf prozessierten Wafern
Abformung von Mikrostrukturen auf prozessierten Wafern
1993, Kernforschungszentrum Karlsruhe
in German

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Book Details

Edition Notes

Summary in English.

Thesis (doctoral)--Universität Karlsruhe, 1993.

Published in
Karlsruhe
Series
KfK (Series) -- 5171
Other Titles
Technique of application of mechanical microstructures onto microelectronic circuits.

The Physical Object

Pagination
84 p.
Number of pages
84

Edition Identifiers

Open Library
OL57232377M
OCLC/WorldCat
35546304

Work Identifiers

Work ID
OL42183594W

Source records

harvard_bibliographic_metadata record

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December 14, 2024 Created by MARC Bot Imported from harvard_bibliographic_metadata record