An edition of Device and Process Technologies for MEMS and Microelectronics (1999)

Device and process technologies for MEMS and microelectronics

27-29 October 1999, Royal Pines Resort, Queensland, Australia

by

Cover of: Device and process technologies for MEMS and microelectronics by Sima Dimitrijev
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Last edited by MARC Bot
September 13, 2020 | History
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An edition of Device and Process Technologies for MEMS and Microelectronics (1999)

Device and process technologies for MEMS and microelectronics

27-29 October 1999, Royal Pines Resort, Queensland, Australia

by

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Publish Date
Publisher
SPIE
Language
English
Pages
394

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Previews available in: English

Subjects

Microelectronics, Microelectromechanical systems, Congresses, Photolithography, Photomechanical processes, Photon detectors, Design and construction
Edition Availability
Cover of: Device and process technologies for MEMS and microelectronics
Device and process technologies for MEMS and microelectronics: 27-29 October 1999, Royal Pines Resort, Queensland, Australia
1999, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 3892, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3892.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7875 .D48 1999, TK7875.D48 1999

The Physical Object

Pagination
vii, 394 p. :
Number of pages
394

Edition Identifiers

Open Library
OL6898376M
ISBN 10
0819434930
LCCN
00702718
OCLC/WorldCat
43166751
Goodreads
2675561

Work Identifiers

Work ID
OL20988788W

Source records

Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

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September 13, 2020 Edited by MARC Bot import existing book
July 31, 2020 Created by ImportBot import existing book