An edition of Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V (1986)

Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V

11-12 March 1986, Santa Clara, California

Cover of: Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V by Phillip D. Blais, chairman/editor.
Preview
Borrow Listen

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today
Notes
Notes

Check nearby libraries

Buy this book

Last edited by MARC Bot
December 11, 2022 | History
Edit
An edition of Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V (1986)

Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V

11-12 March 1986, Santa Clara, California

This edition doesn't have a description yet. Can you add one?

Publish Date
Publisher
SPIE--the International Society for Optical Engineering
Language
English
Pages
272

Check nearby libraries

Buy this book

Previews available in: English

Subjects

Electron beam Lithography, Congresses, Ion beam lithography, X-ray lithography, Microlithography

Showing 1 featured edition. View all 1 editions?

Edition Availability
Cover of: Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V
Electron-beam, x-ray & ion-beam techniques for submicrometer lithographies V: 11-12 March 1986, Santa Clara, California
1986, SPIE--the International Society for Optical Engineering
in English
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Includes bibliographies and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering ;, v. 632
Other Titles
Electron-beam, x-ray, and ion-beam techniques for submicrometer lithographies V.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7874 .E484 1986

The Physical Object

Pagination
vi, 272 p. :
Number of pages
272

ID Numbers

Open Library
OL2743457M
Internet Archive
electronbeamxray0632unse
ISBN 10
089252667X
LCCN
86061034
OCLC/WorldCat
13981354
Goodreads
3710399

Source records

Scriblio MARC record
Library of Congress MARC record
marc_columbia MARC record
Internet Archive item record

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON
December 11, 2022 Edited by MARC Bot import existing book
April 3, 2019 Created by MARC Bot import existing book