An edition of Angular sensitivity of controlled implanted doping profiles (1978)

Angular sensitivity of controlled implanted doping profiles

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Angular sensitivity of controlled implanted d ...
Wilson, Robert G., Wilson, Rob ...
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Last edited by MARC Bot
October 15, 2020 | History
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An edition of Angular sensitivity of controlled implanted doping profiles (1978)

Angular sensitivity of controlled implanted doping profiles

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Publish Date
Publisher
Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Language
English

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Subjects

Semiconductor doping, Ion implantation, Integrated circuits
Edition Availability
Cover of: Angular sensitivity of controlled implanted doping profiles
Angular sensitivity of controlled implanted doping profiles
1978, U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
in English
Cover of: Angular sensitivity of controlled implanted doping profiles
Angular sensitivity of controlled implanted doping profiles
1978, Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English

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Book Details

Edition Notes

Issued Nov. 1978.

CODEN: XNBSAV.

Sponsored by the Defense Advanced Research Projects Agency and the National Bureau of Standards.

Includes bibliographical references.

Published in
Washington
Series
NBS special publication -- 400-49, Semiconductor measurement technology

ID Numbers

Open Library
OL49940648M
OCLC/WorldCat
4482406

Source records

marc_columbia MARC record

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