An edition of Rapid thermal and related processing techniques (1991)

Rapid thermal and related processing techniques

2-3 October 1990, Santa Clara, California

Cover of: Rapid thermal and related processing techniques by Rajendra Singh, Mehrdad M. Moslehi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
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Last edited by MARC Bot
July 31, 2024 | History
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An edition of Rapid thermal and related processing techniques (1991)

Rapid thermal and related processing techniques

2-3 October 1990, Santa Clara, California

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Publish Date
Publisher
SPIE
Language
English
Pages
422

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Previews available in: English

Subjects

Semiconductor doping, Heat treatment, Vapor plating, Rapid thermal processing, Congresses, Semiconductors, Integrated circuits, Design and construction, Manufacturing processes
Edition Availability
Cover of: Rapid thermal and related processing techniques
Rapid thermal and related processing techniques: 2-3 October 1990, Santa Clara, California
1991, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.
Papers presented at the SPIE Conference on Rapid Thermal and Related Processing Techniques.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 1393, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1393.

Classifications

Dewey Decimal Class
621.381/52
Library of Congress
TK7871.85 .R3445 1991

The Physical Object

Pagination
ix, 422 p. :
Number of pages
422

ID Numbers

Open Library
OL1889213M
Internet Archive
isbn_0819404624_1393
ISBN 10
0819404624
LCCN
90050809
OCLC/WorldCat
23606222
Goodreads
3965747

Source records

Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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July 31, 2024 Edited by MARC Bot import existing book
November 11, 2020 Created by MARC Bot import existing book