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December 4, 2010 | History
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Survey on silicon micromachining and microstructures
1989, Future Technology Surveys
in English
1558651020 9781558651029
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Book Details
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Includes bibliographical references.
Includes contributions by other researchers.
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December 4, 2010 | Edited by Open Library Bot | Added subjects from MARC records. |
December 9, 2009 | Created by WorkBot | add works page |