Survey on silicon micromachining and microstructures

Survey on silicon micromachining and microstr ...
Richard Kendall Miller, Richar ...
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Last edited by Open Library Bot
December 4, 2010 | History

Survey on silicon micromachining and microstructures

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Publish Date
Language
English
Pages
98

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Edition Availability
Cover of: Survey on silicon micromachining and microstructures
Survey on silicon micromachining and microstructures
1989, Future Technology Surveys
in English

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Book Details


Edition Notes

Includes bibliographical references.
Includes contributions by other researchers.

Published in
Madison, GA
Series
Survey report ;, #17, Survey report (Future Technology Surveys, Inc.) ;, #17.

Classifications

Library of Congress
HD9696.A3 U568 1989

The Physical Object

Pagination
98 leaves :
Number of pages
98

Edition Identifiers

Open Library
OL2070496M
ISBN 10
1558651020
LCCN
88084050
OCLC/WorldCat
24547026

Work Identifiers

Work ID
OL735890W

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History

Download catalog record: RDF / JSON
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 9, 2009 Created by WorkBot add works page