Surface scattering and diffraction for advanced metrology

1 August 2001, San Diego, USA

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Last edited by MARC Bot
November 14, 2023 | History

Surface scattering and diffraction for advanced metrology

1 August 2001, San Diego, USA

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Publish Date
Publisher
SPIE
Language
English
Pages
164

Buy this book

Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 4447, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4447.
Genre
Congresses.

Classifications

Dewey Decimal Class
681/.25
Library of Congress
TA418.7 .S928 2001

The Physical Object

Pagination
vii, 164 p. :
Number of pages
164

ID Numbers

Open Library
OL3579513M
ISBN 10
0819441619
LCCN
2002265497
OCLC/WorldCat
48545937
Goodreads
6780338

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 14, 2023 Edited by MARC Bot import existing book
June 12, 2023 Edited by ImportBot import existing book
December 5, 2020 Edited by MARC Bot import existing book
February 19, 2019 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record