Surface scattering and diffraction for advanced metrology

1 August 2001, San Diego, USA

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Last edited by MARC Bot
February 19, 2019 | History

Surface scattering and diffraction for advanced metrology

1 August 2001, San Diego, USA

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Publish Date
Publisher
SPIE
Language
English
Pages
164

Buy this book

Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series ;, v. 4447, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4447.
Genre
Congresses.

Classifications

Dewey Decimal Class
681/.25
Library of Congress
TA418.7 .S928 2001

The Physical Object

Pagination
vii, 164 p. :
Number of pages
164

ID Numbers

Open Library
OL3579513M
ISBN 10
0819441619
LCCN
2002265497
OCLC/WorldCat
48545937
Goodreads
6780338

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February 19, 2019 Created by MARC Bot import existing book