An edition of Plasma electronics (2005)

Plasma electronics

applications in microelectronic device fabrication

by and

Cover of: Plasma electronics by T. Makabe, Z. Petrovic, T. Makabe
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Last edited by MARC Bot
December 14, 2022 | History
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An edition of Plasma electronics (2005)

Plasma electronics

applications in microelectronic device fabrication

by and

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Publish Date
Publisher
Taylor&Francis
Language
English

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Previews available in: English

Subjects

Plasma engineering, Mechanical engineering, Science/Mathematics, Physics, Science, Technology & Industrial Arts, Electronics - General, Engineering - Mechanical, Science / Physics, Microelectronics, Plasma (ionized gases), Engineering, Technique des plasmas, TECHNOLOGY & ENGINEERING, Mechanical
Edition Availability
Cover of: Plasma Electronics
Plasma Electronics: Applications in Microelectronic Device Fabrication
2016, Taylor & Francis Group
in English
Cover of: Plasma electronics
Plasma electronics: applications in microelectronic device fabrication
2006, Taylor&Francis
in English
Cover of: Plasma Electronics
Plasma Electronics: Applications in Microelectronic Device Fabrication
2006, Taylor & Francis Group
in English
Cover of: Plasma Electronics
Plasma Electronics
2006, Taylor & Francis Group
in English
Cover of: Plasma Electronics
Plasma Electronics: Applications in Microelectronic Device Fabrication (Series in Plasma Physics)
March 27, 2006, Taylor & Francis
Hardcover in English
Cover of: Plasma electronics
Plasma electronics: applications in microelectronic device fabrication
2005, Taylor&Francis
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Boca Raton, FL
Series
Series in plasma physics

Classifications

Dewey Decimal Class
621.044
Library of Congress
TA2020 .M35 2005, TA2020 .M35 2006, TA2020.M35 2006

The Physical Object

Pagination
p. cm.

ID Numbers

Open Library
OL3431284M
Internet Archive
plasmaelectronic00maka
ISBN 10
0750309768
LCCN
2005056888
OCLC/WorldCat
73514813, 62290646
Goodreads
186205

Source records

Internet Archive item record
Library of Congress MARC record
Better World Books record
marc_columbia MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
December 14, 2022 Edited by MARC Bot import existing book
September 19, 2021 Edited by ImportBot import existing book
September 16, 2021 Edited by ImportBot import existing book
July 31, 2019 Edited by MARC Bot associate edition with work OL5852956W
December 10, 2009 Created by WorkBot add works page