Integrated circuit metrology, inspection, and process control II

29 February-1 March 1988, Santa Clara, California

Integrated circuit metrology, inspection, and ...
Kevin M. Monahan
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Last edited by MARC Bot
July 30, 2019 | History

Integrated circuit metrology, inspection, and process control II

29 February-1 March 1988, Santa Clara, California

This edition doesn't have a description yet. Can you add one?

Publish Date
Language
English
Pages
458

Buy this book

Book Details


Edition Notes

Includes bibliographies and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering -- v. 921
Genre
Congresses.

The Physical Object

Pagination
vii, 458 p. :
Number of pages
458

Edition Identifiers

Open Library
OL21857841M
ISBN 10
0892529563
Goodreads
4270587

Work Identifiers

Work ID
OL9251062W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 30, 2019 Edited by MARC Bot associate edition with work OL9251062W
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
November 4, 2008 Created by ImportBot Imported from Oregon Libraries MARC record