An edition of Integrated Circuit Metrology, Inspection and Process Control II (Spie, Vol 921) (1988)

Integrated circuit metrology, inspection, and process control II

29 February-1 March 1988, Santa Clara, California

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Integrated circuit metrology, inspection, and ...
Kevin M. Monahan
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Last edited by MARC Bot
July 30, 2019 | History
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An edition of Integrated Circuit Metrology, Inspection and Process Control II (Spie, Vol 921) (1988)

Integrated circuit metrology, inspection, and process control II

29 February-1 March 1988, Santa Clara, California

by

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Publish Date
Publisher
SPIE
Language
English
Pages
458

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Subjects

Congresses, Inspection, Integrated circuits, Measurement
Edition Availability
Cover of: Integrated circuit metrology, inspection, and process control II
Integrated circuit metrology, inspection, and process control II: 29 February-1 March 1988, Santa Clara, California
1988, SPIE--the International Society for Optical Engineering
in English
Cover of: Integrated Circuit Metrology, Inspection and Process Control II (Spie, Vol 921)
Integrated Circuit Metrology, Inspection and Process Control II (Spie, Vol 921)
August 1988, Society of Photo Optical
Paperback
Cover of: Integrated circuit metrology, inspection, and process control II
Integrated circuit metrology, inspection, and process control II: 29 February-1 March 1988, Santa Clara, California
1988, SPIE
in English

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering -- v. 921
Other Titles
Integrated circuit metrology, inspection, and process control 2., Integrated circuit metrology, inspection, and process control two.

Classifications

Dewey Decimal Class
621.381/5
Library of Congress
TK7874 .I54682 1988

The Physical Object

Pagination
viii, 458 p. :
Number of pages
458

Edition Identifiers

Open Library
OL21575646M
ISBN 10
0892529563
Goodreads
4270587

Work Identifiers

Work ID
OL9251062W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 30, 2019 Edited by MARC Bot associate edition with work OL9251062W
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
November 3, 2008 Created by ImportBot Imported from University of Toronto MARC record