Integrated circuit metrology, inspection, and process control II

29 February-1 March 1988, Santa Clara, California

Integrated circuit metrology, inspection, and ...
Kevin M. Monahan
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Last edited by MARC Bot
April 2, 2019 | History

Integrated circuit metrology, inspection, and process control II

29 February-1 March 1988, Santa Clara, California

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Publish Date
Language
English
Pages
458

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Book Details


Edition Notes

Includes bibliographies and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering -- v. 921
Genre
Congresses.

The Physical Object

Pagination
vii, 458 p. :
Number of pages
458

Edition Identifiers

Open Library
OL21857841M
ISBN 10
0892529563
Goodreads
4270587

Work Identifiers

Work ID
OL9251062W

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History

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April 2, 2019 Edited by MARC Bot import existing book
March 10, 2019 Edited by MARC Bot import existing book
December 11, 2009 Created by WorkBot add works page